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| No | Descripton | Part number |
| 1 | N2 PURGE BRACKET | 0020-70645 |
| 2 | N2 PURGE MFC BRACKET | 0020-70647 |
| 3 | VALVE PLATE | 0020-70646 |
| 4 | ORF RSTR FLOW 30SLM N2 IN CAJON 1/4VCR | 3510-01034 |
| 5 | CABLE ASSY, N2 PURGE MFC PIGTAIL | 0150-76014 |
| 6 | FTG TBG ADPTR NW25 X 1/4FVCR SST | 3300-02642 |
| 7 | HOSE RETURN RIGHT CHILLED | 0040-13134 |
| 8 | MANIFOLD RIGHT CHILLED FACILITIES | 0040-75820 |
| 9 | HOSE, SUPPLY LEFT, CHILLED | 0040-13133 |
| 10 | MANIFOLD, LEFT, CHILLED FACILITIES | 0040-75821 |
| 11 | BRKT, VALVE, CHMB A/C, CENTURA CMF | 0020-75449 |
| 12 | BRKT, VALVE, CHMB B/D, CENTURA CMF | 0020-75450 |
| 13 | CABLE HOLD DOWN | 0020-22635 |
| 14 | CLAMP 2″ & 1.5″ PIPE | 0020-24319 |
| 15 | BRACKET N2 REGULATOR ETCH | 0020-39575 |
| 16 | SW DET CA .01 X 1AWG WIRE MTL SST 304 | 1270-01392 |
| 17 | Pressure Switch Bracket, MNT Centura MF | 0020-04637 |
| 18 | SWITCH ADAPTER | 1270-01555 |
| 19 | TERM BLK 2P 2ROW 16-14AWG 250V | 1290-01034 |
| 20 | TERM BLK 4P 2ROW 16-14AWG 250V | 1290-01194 |
| 21 | FTG BULKHEAD 3/8 | 3300-01648 |
| 22 | FORE LINE XFER | 0040-70199 |
| 23 | GAUGE 2” DRY 30/100 PSI 1/4″MALE VCR | 3310-01098 |
| 24 | GAUGE PRESS -.1 TO .7MPA/30″HG-100PSI | 0190-14247 |
| 25 | TERM JUMPER 2 | 1290-01068 |
| 26 | RGLTR AIR PRESS 5-100 PSIG NON-RELEIVING | | 1190-01007 |
| 27 | FLANGE ROUGHING LINE TRANSFER CHAMBER | 0040-13013 |
| 28 | FORELINE 316L SST XFER CHAMBER CENTURA | 0050-75078 |
| 29 | FTG BLWS SECTION FLEX NW40 X NW40 | 3300-02130 |
| 30 | FTG TBG EL 1/2T .41 ID SST VCR 90 | 3300-02217 |
| 31 | FTG TBG CONN 1/2VCR X 3/8SWGLK SST | 3300-04374 |
| 32 | MOUNT DOOR TRANSFER SLIT | 0020-20341 |
| 33 | PIVOT TRANSFER SLIT VALVE | 0020-20342 |
| 34 | TRANSFER SLIT VALVE ASSY | 0010-20021 |
| 35 | BLANK SLIT VALVE | 0020-20558 |
| 36 | CLAMP TRANSFER CHMBR | 0020-36419 |
| 37 | NUT CLAMP TRANSFER CHMBR | 0020-36418 |
| 38 | STUD,CLAMP TRANSFER CHMBER | 0020-36420 |
| 39 | PLATE, BLOCKOFF 1.40 DIA TRANSFER CHAMBE | 0020-40117 |
| 40 | BLANK-OFF POSIT. E/F NON END | 0020-40564 |
| 41 | HOLDOWN RING,VIEWPORT | 0030-70084 |
| 42 | Cover Transfer Viewport Lens | 0020-20462 |
| 43 | SHOE,HANDLE, TRANSFER CHAMBER | 0020-41012 |
| 44 | SHOE, HANDLE, TRANSFER CHAMBER | 0020-41008 |
| 45 | BRACKETHARNESS CONNECTOR HP TRNFR | 0020-20838 |
| 46 | CABLE ASSEMBLY,ROBOT TOP MOTOR | 0150-35226 |
| 47 | BRACKET, MAGNETIC SWITCH | 0020-76516 |
| 48 | STDF M/F 1/4 HEX X 2″L 6-32 THD SST | 3790-01550 |
| 49 | INSULATOR CONNECTOR HARNESS | 0020-20840 |
| 50 | INSULATOR COVER HARNESS HP TRNFR & BUF | 0020-20839 |
| 51 | ASSY, MAGNETIC SWITCH | 0090-35002 |
| 52 | INSULATOR MAG SWITCH | 0020-20929 |
| 53 | ORING ID 2.859 CSD .139 VITON 75 DURO | 3870-01234 |
| 54 | ORING ID 4.109 CSD .139VITON75 DURO | 3870-01122 |
| 55 | ORING ID 5.734 CSD .139 VITON 75DURO | 3700-01072 |
| 56 | ORING ID 8.234 CSD .139 VITON 75DURO | 3700-01389 |
| 57 | ORING ID 7.234 CSD .139 Viton 75DURO BRN | 3700-01509 |
| 58 | ORING ID 7.484 CSD .139 VITON 75 DURO BRN | 3700-01504 |
| 59 | ORING ID 11.984 .139 CSD VITON 75 DURO | 3700-01374 |
| 60 | ORING ID 28.0 CSD .210 VITON 75DURO. | 3700-01426 |
| 61 | ORING ID 4.984 CSD .139 VITON 75DURO BRN | 3700-01427 |
| 62 | ORING ID 8.234 CSD .139 VITON 75DURO BLK | 3700-01389 |
| 63 | ORING ID .674 CSD .103 VITON 75DURO BRN | 3700-02044 |
| 64 | ORING ID 4.109 CSD .139VITON75 DURO | 3700-01122 |
| 65 | ORING ID 6.734 CSD .139VITON75 DURO | 3700-01134 |
| 66 | ORING ID 4.484 CSD .139 VITON 75DURO BRN | 3700-01828 |
| 67 | ASSY OPERATOR CONTROL CENTURA | 0010-20813 |
| 68 | MOUNT LEVELING 3/4-10X9 0LX3 DIA STL Z | 3480-01174 |
| 69 | MAINFRAME FOOT | TBA |
| 70 | 1/8 GREEN 200M | for 0140-75013 |
| 71 | 1/8 RED 200M | for 0140-75013 |
| 72 | 1/4 ORANGE 200M | for 0140-75013 |
| 73 | 1/4 WHITE 200M | for 0140-75013 |
| 74 | 1/4 BLACK 200M | for 0140-75013 |
| 75 | 1/4 T-BLUE 200M | for 0140-75013 |
| 76 | 3/8 BLACK 200M | for 0140-75013 |
| 77 | 3/8 T-BLUE 200M | for 0140-75013 |
| 78 | ORING ID 2.859 CSD .139 VITON 75 DURO BLK | 3700-01234 |
| 79 | ORING ID 17.955 CSD .210 VITON 75 | 3700-01136 |
| 80 | SEAL CTR RING ASSY NW160 W/VITON | 3700-01864 |
| 81 | ORING ID 2.859 CSD .139 VITON 75 DURO BLK | 3700-01234 |
| 82 | ORING ID 4.989 CSD .070W VITON 75 | 3700-01401 |
| 83 | ORING ID 1.359 CSD .139 VITON 75DURO BLK | 3700-01259 |
| 84 | ORING ID 4.100 CSD .210 VITON 75DURO | 3700-01546 |
| 85 | O RING ID 2.859 CSD .139 VITON 75 BROWN | 3700-01508 |
| 86 | ORING ID 2.484 CSD .139 VITON 75DURO BRN | 3700-01545 |
| 87 | CLAMP BHD KIOO-BC 123 ID 39THKAL 00 HARDWARE | 0690-01797 |
| 88 | SEAL CTR RINGASSY NW25 ORING | 3700-01089 |
| 89 | SEAL CTR RINGASSY NW25 RING | 3700-01352 |
| 90 | SEAL CTR RING ASSY NW40 | 3700-01087 |
| 91 | FTGFLANGE BLANKOFF | 3300-01346 |
| 92 | FTGFLANGE BLANK-OFF NW40 216ODX20THK SST304 | 3300-01347 |
| 93 | CLAMP Kl 50-BC BULKHEAD W/ 6BOLTS NW40 NO HARDWARE | 0690-01812 |
| 94 | AMAT Logo Nameplate | 0020-40900 |
| 95 | Center Seal O-ring | 3700-01864 |
| 96 | Flange Blank-off | 3300-03223 |
| 97 | Flange Clamp | 0690-01796 |
| 98 | Holddown Ring | 0030-70084 |
| 99 | LL Door Stop | 0020-75037 |
| 100 | O-ring AS-233 | 3700-01234 |
| 101 | Viewport Cover | 0020-20462 |
| 102 | BAFFLE ASSEMBLY | 0010-76932 |
| 103 | WSHRFLAT #10 6400DX.1901DX.060THK SST | 3880-01154 |
| 104 | BRG BALL 1/20DX1/41DX3/16W IROW FLGDABEC-7 SST | 3060-01076 |
| 105 | LINKAGE CARRIAGE DOOR MECH | 0020-40360 |
| 106 | CARRIAGE, LHS | 0020-40716 |
| 107 | PLATE, SIDE, LHS | 0020-41193 |
| 108 | BRG RLR CAM FLR 3/4 DA CRNED .500 WIDE .25 BORE | 3060-01457 |
| 109 | SCR CAP SKT HD 6-32 X 1/41- HEX SKT SST SLVR-PLT | 3690-01889 |
| 110 | SCRMACH SHLDR 10-32X.24950DX12L HEX SKT SST303 | 3690-01641 |
| 111 | USE 3690-01914 SCR CAP SKT HD 8-32 X 1/2L SLVR-PLT | 3690-01862 |
| 112 | SPCR SHAFT 375 OD 2501D 031 SST | 3790-01343 |
| 113 | SHAFT, CAM FOLLOWER DOOR MECH | 0020-40301 |
| 114 | SPREXT 4.OOFL X .7500D X .085WtRE DA SST | 3780-01165 |
| 115 | SPR CPRSN .250FLX .2100D X .026WlRE DA SST | 3780-01169 |
| 116 | STDF FIF 1/4HEX 6-32 X 3/8L SST NO-FINISH | 3790-01492 |
| 117 | WSHR LKG SPLIT #1/4 48700 X .260DX .062THK SST | 3880-01129 |
| 118 | WSHRLKG SPLIT #8 .2930D X .1741D X .040THK SST | 3880-01024 |
| 119 | ECCENTRIC,CAM FOLLOWER | 0020-10200 |
| 120 | CMFLR W/ROD .625 DIA 1/4-28 HEX | 3150-01007 |
| 121 | NUTHEX JAM 1/4-28 X 5/32THK psvr-ssr | 3500-01048 |
| 122 | CARRIAGE, RHS | 0020-40717 |
| 123 | PLATE, SIDE, RHS | 0020-41194 |
| 124 | NUT HEX FULL 1/4-28 X 7/32L SST PSVT | 3500-01049 |
| 125 | SCRCAP SKT HD 8-32 X 3/8L HEX SO SST SLVR-PLT | 3690-01895 |
| 126 | LLC CARRIAGE SUPPORT | 0020-40888 |
| 127 | RETAINER SPRING DOOR MECH | 0020-40359 |
| 128 | STOP BEARING MOUNT LLC DOOR | 0020-40729 |
| 129 | HARNESS ASSY SMIF WB LLB INTRCNCT PHASE 2 FACIL | 0140-02655 |
| 130 | HARNESS ASSY SMIF WB LLB INTRCNCT PHASE 2 FACIL | 0140-02654 |
| 131 | COVER, DET ADJUST ASSY FAST WAFER | 0021-76309 |
| 132 | Support Bracket | 0020-75998 |
| 133 | Viewport Detector Clamp | 0020-13652 |
| 134 | COVER ANALOG SYNC PWA FAST WAFER MAPPING | 0040-76532 |
| 135 | BRACKET, ANALOG SYNC PWA, FAST WAFER MAPPING | 0040-13149 |
| 136 | STDF MIF 1/4 HEX X 3/8L SST 6-32THD | 3790-01530 |
| 137 | STDF MIF 1/4HEX 6-32 X 1.25LSST NO-FINISH | 3790-01414 |
| 138 | WSHR FLAT #4 .312OD X .125ID X .031THK SST | 3880-01004 |
| 139 | WASHER LKG SPLIT #4 .203ODX.120 ID X.025 THK SST | 3880-01022 |
| 140 | WSHRFLAT #6 .375OD X .149ID X .031THK SS | 3880-01006 |
| 141 | WSHRLKG SPLIT #6 .25OD X .148ID X .031THK SST | 3880-01023 |
| 142 | COVER BRKT, DET ADJUST ASSY FAST WAFER | 0040-76439 |
| 143 | DETECTOR ASSY LEFT FAST WAFER MAPPING | 0010-76859 |
| 144 | DETECTOR ASSY, RIGHT FAST WAFER MAPPING | 0010-76858 |
| 145 | SCRMACH PAN HD 6-32 X 1/4L PHIL SST SLVR | 3690-02289 |
| 146 | SCREW MACH CAP HEX SKT (4-40 X 1/4L SST SLVER) | 3690-01869 |
| 147 | INSERT,DETECTOR VIEWPORT | 0020-04766 |
| 148 | ORING ID 4.989 CSD .070 VITON 75DURO BLK UHP | 3700-02919 |
| 149 | WBLL BRKT, LED BOARD MOUNT, FAST WAFER MAPPING | 0020-13963 |
| 150 | COVER WAFER MAP LED, FAST WAFER MAPPING | 0020-13965 |
| 151 | ASSY, LED-WB, FAST WAFER MAPPING | 0090-76037 |
| 152 | FTG TBG ELBOW 118TX 118MNPT1-TOUCHQK-DISCON | 3300-02279 |
| 153 | LLAVENT SIDE NARR LLC | 0050-76033 |
| 154 | LLB VENT SIDE NARR LLC | 0050-76034 |
| 155 | VENT VALVE LINE BOTTOM NARR LLC | 0050-76036 |
| 156 | VENT VALVE LINE TOP NARR LLC | 0050-76035 |
| 157 | GAS LINE DIFFERENTIAL PLUMBING 3 OF 3 | 0050-20740 |
| 158 | VALVE BRKT DIFFERENTIAL PLUMBING | 0020-24093 |
| 159 | Flex Hoss 1/4 inch VCR | 3300-03211 |
| 160 | FTG TBG UNION TEE 14200OSI 14VCR-M/M/M SST | 3300-01939 |
| 161 | HARNESS SMIF INTEGRATED WB LLA INTRCNT | 0140-76877 |
| 162 | HARNESS SMIF INTEGRATED WB LLB INTRCNT | 0140-76878 |
| 163 | Vacuum Tube TEE, NW40 Flanges and NW25 Reducer + Convectron Gauge | 0040-20433 |
| 164 | FTG BLWS SECTION FLEX NW40 X NW40 3.94 | 3300-02130 |
| 165 | ASSY, SENSOR WAFER SLIDE RECEIVER | 0090-76035 |
| 166 | ASSY SENSOR WAFER PRESENT/WAFER SLIDE | 0090-76034 |
| 167 | VIEWPORT COVER TRANSFER CHAMBER | 0020-20462 |
| 168 | CLAMP, RELIEF, STRAIN WBLL | 0020-13978 |
| 169 | WSHRLKG SPLIT #8 2930D X .1741D X .040THK SST | 3880-01024 |
| 170 | ALIGNMENT TOOL FROG LEG ROBOT | 0040-20095 |
| 171 | ARM FROG LEG 5200 | 0020-35033 |
| 172 | WING FROG LEG 5200 | 0020-35032 |
| 173 | ORING ID 4.484 CSD -139 VITON 75 DURO | 3700-01381 |
| 174 | ORING ID 6.734 CSD .139VlTON75 DURO | 3700-01134 |
| 175 | USE 3690-01914 SCR CAP SKT HD 8-32 X 1/2)- SLVR-PLT | 3690-01862 |
| 176 | SCRCAP SKT HD 8-32 X 3/81- HEX SKT SST SLVR-PLT | 3690-01895 |
| 177 | WSHR BLVL.8750D X -1901D X 720T SST302 | 3880-01085 |
| 178 | SHAFT WING | 0020-35088 |
| 179 | AMAT HTR TAPE SLF-RGLTG 120 VAC | 1010-01040 |
| 180 | HARNESS ASSY,DTLR STATUS GPLIS | 0140-38487 |
| 181 | CABLE ASSY TEOS DTLR TO SYSTEM | 0150-38911 |
| 182 | CABLE ASSY TEPO DTLR TO SYSTEM | 0150-38912 |
| 183 | CABLE ASSY TEB DTLR TO SYSTEM | 0150-38913 |
| 184 | SENSO-DG-PRPJ CABLE ASSY DTLR JUMPER | 0150-38914 |
| 185 | MODIFICATION FITTING ELBOW | 0015-35222 |
| 186 | FTGHOSE ADPTR 3/8HOSE TO 114TUBE SST BARB | 3300-03984 |
| 187 | ORING ID 5.359 CSD .139 VITON 75DURO BLK | 3700-01370 |
| 188 | FTG FLG 2-3/4 PD X .5″ SST BLK NON-ROT CF | 3300-02240 |
| 189 | FTG ADPTR FLG 1.330D TO MALE 1/4VCR SST | 3300-03919 |
| 190 | WINDOW, FRONT | 0200-35388 |
| 191 | N2 BAFFLE | 0020-39658 |
| 192 | ORING ID 10.984 CSD .139 VITON 75DURO BLK | 3700-01272 |
| 193 | ORING ID 8.734 CSD .139 VITON 75 DURO BLK | 3700-01429 |
| 194 | COVER, TOP, MULTI-SLOT COOLDOWN | 0021-01730 |
| 195 | CLAMP, WINDOW with 0020-39799 | 0020-39701 |
| 196 | ASSY, 8″ COOLING CASSETTE COOLDOWN ( Condition: SECOND SOURCE NEW | 0010-37264 |
| 197 | High temperature tie 130°C 140mm | 1330-01040 |
| 198 | Al tape 180 ft (55 m) roll of aluminum tape for attaching heating cables and thermostat sensors to pipes and tanks. Minimum installation temperature: 32°F (0°C). Dimensions: 2.5 in wide, 5 mils thick | |
| 199 | PANEL, CONNECTOR CENTURA CMF VRZ VHP ROBOT | 0040-00637 |
| 200 | SCREW CAP | |
| 201 | SPRCPRSN .750FL X .120OD X .020WIRE-DIA | 3780-01106 |
| 202 | SCR MACH SHLDR 4- 40X.1245ODX3/16L HEX | 3690-02257 |
| 203 | GAS LINE VENT CENTURA LLA | 0050-20708 |
| 204 | GAS LINE VENT LINE CENTURA LLA | 0050-20751 |
| 205 | GASLINE DUAL VALVE LLC | 0050-20662 |
| 206 | DIFFERENTIAL PLUMBING LLB | 0050-20724 |
| 207 | ASSY FILTER/DIFFUSER LOADLOCK | 0190-21067 |
| 208 | SIGNAL TOWER 4 COLOR NW40 316L | 0090-03429 |
| 209 | CABLE ASSY, PHOTO HELIX 2, UHP | 0090-09139 |
| 210 | CABLE ASSY, CHMBR PNEU, DI/O CENTURA | 0150-10093 |
| 211 | CABLE ASSY, TC CHAMBER TRAY INTERFACE | 0150-20641 |
| 212 | CABLE ASSY, LLA WAFER MAP CASS.. SENSE | 0150-20509 |
| 213 | CABLE ASSY, LLB WAFER MAP CASS.. SENSE | 0150-20510 |
| 214 | CABLE ASSY, LLA LED PWR | 0150-20238 |
| 215 | CABLE ASSY, LLB LED PWR | 0150-20239 |
| 216 | HARNESS ASSY, LLC A WAFER MAP SENSE L/R | 0140-20253 |
| 217 | HARNESS ASSY, LLC B WAFER MAP SENSE L/R | 0140-20254 |
| 218 | VALVE, TWO STAGE INLINE NW40 316L | 0190-13041 |
| 219 | MKII-XT WELDMENT, FORELINE | 0040-76148 |
| 220 | ELBOW, LLC EXHAUST TTF, CENTURA COMMON | 0040-13264 |
| 221 | KF25 90 ELBOW MANUAL VALVE | |
| 222 | 1/8 poly line color trans 200m | |
| 223 | N2 PURGE CHECK VALVE | |
| 224 | N2 PURGE RESTRICTOR 5SLM | |
| 225 | CABLE, HARNESS MFC | 0150-76817 |
| 226 | BRKT MID SUPPORT, O3 DIVERTER CLAMP, BRACKET, O3 DIVERT, GAS PALLET | 0021-10968 0021-10969 |
| 227 | PAD QUARTZ UPPER RING | 716-004655-002 |
| 228 | RING,CNFMT,TOP | 716-443083-404 |
| 229 | BAF,LWR OF THREE,SIC,CON | 716-140125-200 |
| 230 | SLIT ACTURATOR CYLINDER WITH SENSOR CABLE & SPEED CON | 3020-01052 |
| 231 | ASSY UNIVERSAL WBLL CASSETTE PLATFORM | 0010-22664 |
| 232 | ASSEMBLY, LIFT CONFIG, MULTI COOL DOWN INDEXER | 0010-37349 |
| 233 | WIDEBODY INDEXER ASSY | 0010-40073 |
| 234 | ASSY UNIVERSAL WBLL CASSETTE PLATFORM | 0010-22664 |
| 235 | ASSEMBLY, LIFT CONFIG, MULTI COOL DOWN INDEXER | 0010-37349 |
| 236 | Centura system controller rack assembly | |
| 237 | Backplane board 4종 | |
| 238 | EMO assembly | |
| 239 | All ribbon cable | |
| 240 | > All Front circuit breaker 4 chamber | |
| 241 | > 1kva TR 1ea | |
| 242 | > 3kva TR 1ea | |
| 243 | > 4kva TR 1ea | |
| 244 | PCB ASSY ANALOG SYNC DETET | 0100-20066 |
| 245 | CABLE ASSY LLA WAFER MAP CASS SENSE | 0150-20509 |
| 246 | CABLE ASSY LLB WAFER MAP.CASS SENSE | 0150-20510 |
| 247 | BLANK FACE CENTURA 5200 | 0020-40905 |
| 248 | Harness Cable DxZ | 0140-38233 |
| 249 | DxZ Motor Belt | 3080-01063 |
| 250 | Lead Screw(OEM Overhual) | 3690-03269 |
| 251 | 5-phase Motor(OPM NEW) | 0190-35463 |
| 252 | Harness Cable DxZ | 0140-38233 |
| 253 | DxZ Motor Belt | 3080-01063 |
| 254 | Lead Screw(OEM Overhual) | 3690-03269 |
| 255 | 5-phase Motor(OPM NEW) | 0190-35463 |
| 256 | Centura HOIST 2nd NEW | |
| 257 | CxZ Heater Driver Max 30A ( Second Source New ) | 0190-35875 |
| 258 | CxZ Vacuum Line Kit (ChA/B/C/D) 2nd new. Includes the ff 0050-39573 ChA/B 0050-32286 ChC/D 0050-37556 ChA/B/C/D 0050-37557 ChA/B/C/D 0040-09217 ChA/B/C/D | |
| 259 | Drip and In-line Spill Sensor Kit (New | |
| 260 | Drip, Swagelok kit (6-Weeks) | |
| 261 | Divert valve (Overhual | |
| 262 | Watlow All Cable | |
| 263 | CxZ Vacuum Line Kit (ChA/B/C/D) 2nd new. Includes the ff 0050-39573 ChA/B 0050-32286 ChC/D 0050-37556 ChA/B/C/D 0050-37557 ChA/B/C/D 0040-09217 ChA/B/C/D | |
| 264 | Drip and In-line Spill Sensor Kit (New | |
| 265 | Drip, Swagelok kit (6-Weeks) | |
| 266 | Divert valve (Overhual | |
| 267 | Watlow All Cable | |
| 268 | CxZ Hinge 2nd NEW | |
| 269 | CxZ Chamber Cover 2nd NEW | |
| 270 | Cable EV manifold 2 | 0150-35616 |
| 271 | Cable EV manifold 1 | 0150-35615 |
| 272 | Seriplex comm cable assy CH A,B,C,D | 0150-35853 |
| 273 | Seriplex comm cable assy CH A,B,C,D | 0150-35854 |
| 274 | Seriplex comm cable assy CH A,B,C,D | 0150-35855 |
| 275 | Seriplex comm cable assy CH A,B,C,D | 0150-35856 |
| 276 | Cable i/o power distribution | 0150-10328 |
| 277 | APC gas panel comm 60ft | 0150-10505 |
| 278 | Harness assy exhaust interlock | 0140-10033 |
| 279 | press. Trans. HRN 11-13 | 0140-10034 |
| 280 | harness press XDCR seriplex (APC)/ VME 2 | 0140-09996 |
| 281 | Harness pressure tranducer 7-10 | 0140-10035 |
| 282 | Foreline TC gauge (5200), GAUGE TC 1-1000 MTORR METALTUBE 1/8″IPS | 3310-01071 |
| 283 | Lid cover interlock switch | 0150-10454 |
| 284 | PLATE, CAPING, ATM. PORT | 0020-33351 |
| 285 | WELDMENT,DUAL BARATRON PORT,DXZ GIGA-FILL | 0050-32387 |
| 286 | CLAMP, DXZ, CXZ, LID, OVER PRESSURE | 0021-01010 |
| 287 | CABLE ASSY, LIMIT SWITCH-B | 0150-36950 |
| 288 | CABLE,HEATER LIFT,GIGA-FILL SACVD | 0150-00490 |
| 289 | HARNESS ASSY GIGAFILL CHAMBER | 0140-01741 |
| 290 | HARNESS ASSEMBLY, CENTURA DXZ, RPS/DPA/EP ADAPTOR | 0140-06248 |
| 291 | CABLE ASSY GIGA LID COVER INTRL | 0150-00235 |
| 292 | OPTO sensor | 0100-09042 |
| 293 | Top robot cable harness | 0150-18058 |
| 294 | UDX5114 5-Phase Driver ( Robot upper/lower motor driver forMainframe ) | |
| 295 | UDX5114 5-Phase Driver ( Loadlock A/B motor driver for Mainframe ) | |
| 296 | UD2115 2-Phase Driver | |
| 297 | MOUNTING BRACKET | 0020- 13602 |
| 298 | Cable Assembly MainframePneunatics | 0150-20628 |
| 299 | AMAT PCB INTERCONNECTOR ASSEMBLY | 0100-76065 |
| 300 | MAINFOLD LOW PRESSURE PNEUMATICS | 0190-76204 |
| 301 | MAINFOLD HIGH PRESSURE PNEUMATICS | 0190-76205 |
| 302 | CHAMBER PNEUMATIC SOLBLOCK ASSY | |
| 303 | INSERT LLA LLB SLIT VALVE | 0020- 35057 |
| 304 | INSERT SLIT VALVE | 0021- 04277 ( 0020-20587 ) |
| 305 | CXZ Chamber Body | 0021-09735 |
| 306 | VALVE PNUM DIAPH NO Overhual | 3870-02153 |
| 307 | Swageloke, M/M NC Valve | |
| 308 | 5-Phase Driver Bracket | |
| 309 | 0150-10073 | 0150-10073 |
| 310 | 0150-13048 | 0150-13048 |
| 311 | OTF Assy | 0010-76764 |
| 312 | OTF Assy | 0010-76765 |
| 313 | Centura SMIF Kit. Includes the following parts > 0040-33711 – 1ea > 0150-06051 – 2ea > 0140-02654, 02655 – 2ea > SMIF RS232 Cable 75FT – 2ea > 0040-75661 – 1ea > 0190-07662 – 2ea > 0021-07573,07574 – 2ea > 0021-76742 – 2ea | |
| 314 | OKB3, Smoke Sensor | |
| 315 | INSULATOR,CATHODE BASE,200MM,DPS | 0021-09511 |
| 316 | PLATE REFLECTOR 200MM XE CHAMBER RTP | 0021-35008 |
| 317 | INSERT RING.SILICON,200MM,NOTCH(2),SI/QT | 0200-10446 |
| 318 | RING, CAPTURE, CERAMIC,SEMI NOTCH NO FLA | 0200-00945 |
| 319 | LIFT PIN, .149 DIA TRIANGULAR | 0200-36373 |
| 320 | RING, CAPTURE C-ESC, SNNF, 200MM, METAL | 0200-00250 |
| 321 | SEAL, CTR RING ASSY | 3700-02322 |
| 322 | WELDMENT, BELLOWS ASSY, LOWER, GIGA-FILL | 0040-36300 |
| 323 | SILICON INSERT, RETAINER RING, RTP XE | 0020-13257 |
| 324 | TEFLON SEAL, SIGMA THROTTLE VALVE | 0021-17875 |
| 325 | PIN, SPACER WXZ+ | 0200-00353 |
| 326 | SCREW, HEX, CAP SKT HD, 10-24X15/16L, CA | 0015-00850 |
| 327 | CONN COAX ADPTR STR SKT TYPE 716 | 0720-02773 |
| 328 | CLAMP,BULKHEAD,RF PIN,CATHODE,DPS | 0021-09445 |
| 329 | SCREW, PAN HD .190-32, HAYNES | 0021-38786 |
| 330 | BRG LINEAR BALL .875″ OD .5″ BORE .046 | 3060-01205 |
| 331 | RETAINER,O-RING,2-204,DPA | 0021-10597 |
| 332 | GSKTKIT NW-40 MDC | 3320-01057 |
| 333 | CAPTIVE SCREW,CLAMP RING | 0015-35201 |
| 334 | INSERT,SILICON,CH REFLECTOR,RTP CHAMBER | 0200-35362 |
| 335 | SEAL, GASKET | 0190-00003 |
| 336 | 60AMP 600V 10 FULLWAVE RECTIFIER MODULE | 0840-00080 |
| 337 | HOUSING, GAS FEED, DPS A3 CHAMBER | 0200-35295 |
| 338 | NOZZLE, 99.5% ALO, 2.55L, 1.5%, ULTIMA, | 0200-18093 |
| 339 | WINDOW, ENDPOINT, INNER DPS MEC | 0200-39133 |
| 340 | HSINK THERMO CONDUCTIVE .001THICKX24WX14 | 0020-16279 |
| 341 | PIN,LIFT (QUARTZ),MOD II | 0200-35486 |
| 342 | LIFTING PIN 200MM | 0200-09071 |
| 343 | WASHER, NOZZLE, ULTIMA HDPCVD | 0020-18899 |
| 344 | HOLDER, PIN, HDP-CVD | 0020-31064 |
| 345 | RING, TEFLON, GUARD THV HDP-CVD | 0020-18269 |
| 346 | RETAINER, SEAL, SIGMA THROTTLE VALVE | 0021-06661 |
| 347 | O-RING | 3700-02945 |
| 348 | PCB ASSEMBLY, OPTO SWITCHPCB ASSEMBLY, OPTO SWITCH | 0100-09042 |
| 349 | WINDOW, RECESSED ENDPOINT, 4MM APERTURE | 0200-35801 |
| 350 | SCREW,LID LINER TXZ | 0200-35611 |
| 351 | SEAL | 3700-01547 |
| 352 | PUL TMG BELT 1/5P 15GRV .313 BORE DBL | 3610-01086 |
| 353 | FLTR CARTRIDGE 9-3/4 L 25 MICRON | 4020-00717 |
| 354 | REV P2 KTC 06-12-97 | 0150-76282 |
| 355 | INSULATOR,CATHODE BASE,200MM,DPS | 0021-09511 |
| 356 | PLATE REFLECTOR 200MM XE CHAMBER RTP | 0021-35008 |
| 357 | INSERT RING.SILICON,200MM,NOTCH(2),SI/QT | 0200-10446 |
| 358 | RING, CAPTURE, CERAMIC,SEMI NOTCH NO FLA | 0200-00945 |
| 359 | LIFT PIN, .149 DIA TRIANGULAR | 0200-36373 |
| 360 | RING, CAPTURE C-ESC, SNNF, 200MM, METAL | 0200-00250 |
| 361 | SEAL, CTR RING ASSY | 3700-02322 |
| 362 | WELDMENT, BELLOWS ASSY, LOWER, GIGA-FILL | 0040-36300 |
| 363 | SILICON INSERT, RETAINER RING, RTP XE | 0020-13257 |
| 364 | TEFLON SEAL, SIGMA THROTTLE VALVE | 0021-17875 |
| 365 | PIN, SPACER WXZ+ | 0200-00353 |
| 366 | SCREW, HEX, CAP SKT HD, 10-24X15/16L, CA | 0015-00850 |
| 367 | CONN COAX ADPTR STR SKT TYPE 716 | 0720-02773 |
| 368 | CLAMP,BULKHEAD,RF PIN,CATHODE,DPS | 0021-09445 |
| 369 | SCREW, PAN HD .190-32, HAYNES | 0021-38786 |
| 370 | BRG LINEAR BALL .875″ OD .5″ BORE .046 | 3060-01205 |
| 371 | RETAINER,O-RING,2-204,DPA | 0021-10597 |
| 372 | GSKTKIT NW-40 MDC | 3320-01057 |
| 373 | CAPTIVE SCREW,CLAMP RING | 0015-35201 |
| 374 | INSERT,SILICON,CH REFLECTOR,RTP CHAMBER | 0200-35362 |
| 375 | SEAL, GASKET | 0190-00003 |
| 376 | 60AMP 600V 10 FULLWAVE RECTIFIER MODULE | 0840-00080 |
| 377 | HOUSING, GAS FEED, DPS A3 CHAMBER | 0200-35295 |
| 378 | NOZZLE, 99.5% ALO, 2.55L, 1.5%, ULTIMA, | 0200-18093 |
| 379 | WINDOW, ENDPOINT, INNER DPS MEC | 0200-39133 |
| 380 | HSINK THERMO CONDUCTIVE .001THICKX24WX14 | 0020-16279 |
| 381 | PIN,LIFT (QUARTZ),MOD II | 0200-35486 |
| 382 | LIFTING PIN 200MM | 0200-09071 |
| 383 | WASHER, NOZZLE, ULTIMA HDPCVD | 0020-18899 |
| 384 | HOLDER, PIN, HDP-CVD | 0020-31064 |
| 385 | RING, TEFLON, GUARD THV HDP-CVD | 0020-18269 |
| 386 | RETAINER, SEAL, SIGMA THROTTLE VALVE | 0021-06661 |
| 387 | O-RING | 3700-02945 |
| 388 | PCB ASSEMBLY, OPTO SWITCHPCB ASSEMBLY, OPTO SWITCH | 0100-09042 |
| 389 | WINDOW, RECESSED ENDPOINT, 4MM APERTURE | 0200-35801 |
| 390 | SCREW,LID LINER TXZ | 0200-35611 |
| 391 | SEAL | 3700-01547 |
| 392 | PUL TMG BELT 1/5P 15GRV .313 BORE DBL | 3610-01086 |
| 393 | FLTR CARTRIDGE 9-3/4 L 25 MICRON | 4020-00717 |
| 394 | REV P2 KTC 06-12-97 | 0150-76282 |
| 395 | Assy, HV ESC, 200mm Cathode, DPS | 0090-09166 |
| 396 | ASSY, RF PEAK (0090-09165) | 0090-09165 |
| 397 | TC Probe K-Type 5/16-18 Tef Insul | 1310-01045 |
| 398 | DISK 8 ADVANCED 101 SHUTTER | 0020-27455 |
| 399 | NSULATOR CATHODE BASE | 0040-42000 |
| 400 | Housing, Bushing, Cathode, DPS | 0020-33773 |
| 401 | CLAMP, BULKHEAD, RF PIN, CATHODE DPS | 0021-09445 |
| 402 | FOCUS RING | 0200-00137 |
| 403 | FILTER, UV, VIEW WINDOW, POLY DPS | 0020-38851 |
| 404 | NSULATOR CATHODE BASE | 0040-42000 |
| 405 | Housing, Bushing, Cathode, DPS | 0020-33773 |
| 406 | CLAMP, RF BULKHEAD, CATHODE DPS | 0021-09446 |
| 407 | FOCUS RING | 0200-00137 |
| 408 | FILTER, UV, VIEW WINDOW, POLY DPS | 0020-38851 |
| 409 | MKSAX7670 -81 REV:A Remote Plasma Source Generator | AX7670-81 |
| 410 | CMP, ASSY,POL BELL SST MP CHAMBER | 2805-738144, |
| 411 | CLAMP, RF, BULKHEAD, CATHODE, DPS | 0021-09446 |
| 412 | CLAMP, BULKHEAD, RF PIN, CATHODE, DPS | 0021-09445 |
| 413 | CONN COAX ADPTR STR SKT TYPE 716 | 0720-02773 |
| 414 | CLAMP, RF, BULKHEAD, CATHODE, DPS | 0021-09446 |
| 415 | CLAMP, BULKHEAD, RF PIN, CATHODE, DPS | 0021-09445 |
| 416 | CONN COAX ADPTR STR SKT TYPE 716 | 0720-02773 |
| 417 | DRIVER STEPPER MOTOR 5PH 0870-01065 | 0870-01065 |
| 418 | 0200-36630 Normal PLATE, COVER, 8″ HEATER,DXZ | 0200-36630 |
| 419 | 0200-36631 Wide PLATE, COVER, 8″ HEATER,DXZ | 0200-36631 |
| 420 | 0040-70162 CHAMBER LLC LEFT WELDED 0040-70163 CHAMBER LLC RIGHT WELDED | 0040-70162 0040-70163 |
| 421 | BRKT MID SUPPORT, O3 DIVERTER CLAMP, BRACKET, O3 DIVERT, GAS PALLET | 0021-10968 0021-10969 |
| 422 | Interface Board | |
| 423 | Edge Ring, | 0200-10169 |
| 424 | FR WDO CHMBR | 715-031984-003 |
| 425 | O-RING, C2SPD GAS MAN,DOM | 22-443364-00 |
| 426 | O-RING,CHEMRAZ, SSE38,21.171 ID X.142, | 734-007524-289 |
| 427 | O-RING,CHEMRAZ, SSE38,21.171 ID X.142, | 734-007524-294 |
| 428 | O0-RING,CHEMRZ,SSE38,17.955 ID X.139, | 734-007524-284 |
| 429 | RING,EDGE,TOP,EDP,200MM, | ,716-031257-002 |
| 430 | RING,EDGE,TOP,EDP,200MM, | ,716-031257-522 |
| 431 | O-RING,CHEMRAZ,SSE38,0.296 ID X0.139, 734-007524-203 | 734-007524-203 |
| 432 | O-RING,CHEMRAZ,SSE38,1.049 ID X.103 | ,734-007524-121 |
| 433 | O-RING,CHEMRAZ,SSE38,1.112 ID X.103, | 734-007524-122 |
| 434 | O-RING,CHEMRAZ,SSE38,0.609 ID X0.139, | 734-007524-208 |
| 435 | O-RING,CHEMRAZ, ID.671 CSD.139 SSE38 | 734-007524-209 |
| 436 | O-RING VITON 2-215 1.046ID X.139 | 734-061280-215 |
| 437 | KIT ORING CLEAN CHMRZ PNDV/V | 849-801425-350 |
| 438 | BAF,LWR OF THREE,SIC,CON | 716-140125-200 |
| 439 | RING,CONFINEMENT,TOP | 716-443083-404 |
| 440 | UV coated sappire window | 0020-09969 |
| 441 | T/V Lip Seal | 3700-01357 |
| 442 | 75FT -Hot Loop Contro | 0140-16435 |
| 443 | Quartz tube applicator asp++F1981:K1982 | 0200-05367 |
| 444 | window slit ASP | 0200-09441 |
| 445 | TUBE, LIFT, GIGA-FILL SACVD | 0040-02697 |
| 446 | (ASSY SYNERGY V452 SBC | 0090-03467 |
| 447 | WINDOW SAPPHIRE WDO, SAPPHIRE, 25MM X .087 | 716-008608-001 |
| 448 | DXZ LIFT TUBE | 0021-36715 |
| 449 | TUBE, LIFT, GIGA-FILL SACVD | 0040-02697 |
| 450 | (ASSY SYNERGY V452 SBC | 0090-03467 |
| 451 | DOM+H1995+F199+F1995:L1999 | 22-128529-05 |
| 452 | O-ring CHEMRAZ | 22-272819-00 |
| 453 | O-ring CHEMRAZ | 22-443364-00 |
| 454 | RING,FINGER LIFT PLATE 6″ & 8″, DXZ | 0200-10286 |
| 455 | L Bar (Low Frequency) | 03-045549-01 |
| 456 | L Bar (High Frequency) | 03-045549-00 |
| 457 | 0010-20664 (ASSY, SLIT VALVE) | 0010-20664 |
| 458 | Novellus Spindle Assy 200mm | 02-106507-00 |
| 459 | RING | 718-098592-001 |
| 460 | PLATE | 718-098591-002 |
| 461 | QUARTZ NOZZLE INJECTOR-716-012639-024 | 716-012639-024 |
| 462 | WDD,SAPHIRE,25MM X .087 ,716-008608-001 | 716-008608-001 |
| 463 | O-RING,CHEMRAZ,SSE38,1.049 ID X.103 | ,734-007524-121 |
| 464 | O-RING,CHEMRAZ,SSE38,1.112 ID X.103, | 734-007524-122 |
| 465 | O-RING,CHEMRAZ,SSE38,0.609 ID X0.139, | 734-007524-208 |
| 466 | O-RING,CHEMRAZ, ID.671 CSD.139 SSE38, 734-007524-209 | 734-007524-209 |
| 467 | O-RING,CHEMRAZ,SSE38,0.296 ID X0.139, 734-007524-203 | 734-007524-203 |
| 468 | O-RING,CHEMRAZ,SSE38,0.296 ID X0.139, 734-007524-203 | 734-007524-203 |
| 469 | O0-RING,CHEMRZ,SSE38,17.955 ID X.139, | 734-007524-284 |
| 470 | RING EDGE BOT 200-300MM, 716-026652-002 | 716-026652-002 |
| 471 | RING,EDGE,TOP,EDP,200MM,716-031257-522 | 716-031257-522 |
| 472 | O-RING, CHEMRAZ, SSE38, 1.698 ID X .142 | 734-007524-294 |
| 473 | HLDR,QTZ WIN,FCTR, 839-802923-006 | 839-802923-006 |
| 474 | O-RING VITON 2-215 1.046ID X.139, 734-061280-215 | 734-061280-215 |
| 475 | KIT ORING CLEAN CHMRZ PNDV/V, 849-801425-350 | 849-801425-350 |
| 476 | O-RING,CHEMRAZ, SSE38,1.698 IDX.142 | 734-007524-289 |
| 477 | 8″ Ultima | 0040-18208 |
| 478 | Collar flat HDP | 0200-00367 |
| 479 | SPIDER, COOLDOWN LIFT | 0040-75326 |
| 480 | EXCELAN ESC 508 | 839-440462-508 |
| 481 | DOME 14“ ID ASTRON TOP ULTIMA 1.5 | 0200-01006 |
| 482 | Novellus Speed Manifold Inner Oring | 22-272819-00 |
| 483 | Implanter Filament REV F | 17287850 |
| 484 | COLLAR,200MM SNNF,SML FLT | 0200-18109 |
| 485 | ESC ASSY 195MM SEMINOTCH, STD, DPS | 0041-63224 |
| 486 | COVER LOW PROFILE HDPCVD | 0200-18081 |
| 487 | MEMBRANE, CENTER BUMP, 8 TITAN HEAD | 0021-33810 |
| 488 | RING, CAPTURE, CERAMIC,195MM SEMI NOTCH | 0200-35323 |
| 489 | FACE PLATE, HP+ TXZ 200MM | 0040-52451 |
| 490 | ORING ID 13.975 CSD .210 VITON 75 DURO B | 3700-01416 |
| 491 | Nozzle 4-Holes 60Deg Baffl | 0200-01009 |
| 492 | EDGE RING,PURGE HEATER 200MM TXZ | 0022-16419 |
| 493 | CERAMIC NOZZLE ULTIMA | 0200-18093 |
| 494 | Poly Single Ring | 0200-36685 |
| 495 | MANOMETER PORT WINDOW | 0200-35293 |
| 496 | KPEP-V2415J-3Z | |
| 497 | 0020-20462 VIEWPORT COVER TRANSFER | 0020-20462 |
| 498 | 0020-04766 INSERT, DETECTOR VIEWPORT | 0020-04766 |
| 499 | SRD Quartz Cover(지름308*지름285*42H) | |
| 500 | SRD Quartz Cover RING | D01-0026 |
| 501 | BLADE 8 INCH BUFFER FROG LEG | 0020-70285 |
| 502 | COVER,BACK,CHMBR COOLING,DPS POLY | 0021-70282 |
| 503 | CABLE, COAXIAL INTERLOCK ACTUATOR | 0190-00305 |
| 504 | GAUGE TC 1TORR 1/8 MALE W/GOLD PT SENSO | 3310-00236 |
| 505 | LAM ORINGS PTX9600 | 734-007524-295 |
| 506 | 200mm Ceramic Heater (2nd New) | 0010-63224 |
| 507 | 200mm Centura CxZ Heater (0040-37010) | 0010-03843 |
| 508 | EDGE RING, PURGE HEATER 200MM TXZ | 0021-03094 |
| 509 | RING,LOWER ISOLATOR | 0021-02155 |
| 510 | RING,MIDDLE,ISLOLATER | 0021-02156 |
| 511 | PLATE,BLOCKER,TXZ 200MM | 0021-35744 |
| 512 | INSEERT LINER, EXHAUST,TXZ 200MM | 0021-24811 |
| 513 | SHIELD 8″B10 VECTRA IMP .190″THK AL 3S | 0020-29344 |
| 514 | CHAMBER INSERT 200MM TXZ CIP | 0200-00261 |
| 515 | Isolator | 0200-10161 |
| 516 | Lid Liner | 0200-00689 |
| 517 | 0020-20462 VIEWPORT COVER TRANSFER | 0020-20462 |
| 518 | 0020-04766 INSERT, DETECTOR VIEWPORT | 0020-04766 |
| 519 | P/C BEL 8N-CE(88DRM) | ES1D85-009005-15 |
| 520 | UPPER ELECTRODE P-Y2 (DRM2) | ES1D10-204338-13 |
| 521 | RING,F-8SO-SI-260-4A | ES1D10-350650-E1 |
| 522 | PLATE BAFFLE M-9(Y2-Y)(DRM2) | ES1D10-102848-13 |
| 523 | ELECTRODE,UPPER(LD-777) | ES1810-121988-11 |
| 524 | RING,FOCUS N(MTBWC250) | ES1D10-350680-E1 |
| 525 | INNER T/C..FVNVMU40007 DIF SIC | DS1187-069893-13 |
| 526 | COVER BELLOWS A-2(Y2-Y)(U-M) | ES1D10-204418-12 |
| 527 | RING INSULATOR..A7 LA4-8(Q)(DR | ES1D05-300188-12 |
| 528 | VALVE..BUTTERFLY,61144-PH52-AA | ES1D80-000759-12 |
| 529 | SHIELD DEPO 85-M4 (Y2-Y)(DRM2) | ES1D10-315183-15 |
| 530 | COVER RING,INNER(MTBWC250)..(S | ES1805-320140-11 |
| 531 | RING,SHIELD(HARD-LD)(M5 TYPE). | ES1805-220177-12 |
| 532 | CONTR,TEMP..MODEL-121R-Z/C-T4S | DS1187-251377-11 |
| 533 | WINDOW SHIELD DEPO Y1-E(DRM2) | ES1D10-315649-12 |
| 534 | V,AIR..FPR-40-12.7-DKV (1D | ES012-004473-1 |
| 535 | EXTERNAL TORCH..M-361-1R | DS1180-000669-11 |
| 536 | HEC-FSNS-01E..ES-E0621 K2 | DS1180-000019-14 |
| 537 | SET SCREW,SHIELD RING(M5-MNS). | ES1810-431676-11 |
| 538 | FORK | DS1105-300561-13 |
| 539 | ESC ASSY..N D HARD | ES1D85-010783-13 |
| 540 | EXCHANGE KIT,M/A MK-78 YZ #01 | CT1987-000183-11 |
| 541 | RING INSULATOR A7 LA4-Q(DRM2) | ES1D05-300190-12 |
| 542 | BASE RING,INTEGRATED(MTBWC250) | ES1805-320142-11 |
| 543 | PANEL HEATER..21103368621_ | DS2110-345607-11 |
| 544 | PIN,LONG WRAP | MB3M10-409088-21 |
| 545 | CONTROLLER,RKC REX900-EMC..546 | CT1380-102293-11 |
| 546 | PRESSURE CTRL 640A12 | ES1D80-090050-TM |
| 547 | RING,EXH OUTER (EPD)(H6)..(SCC | ES1805-220135-23 |
| 548 | CONVERSION ASS,CMN1000T EP-TIN | MB3M87-061498-11 |
| 549 | REGULATOR..(ASSY) | CT1985-412704-15 |
| 550 | MAP UNIT 8L..MAP-310-VL8(8) | CT5080-004700-17 |
| 551 | VALVE..GATE,I-I97085-2-1 | ES1D80-002331-12 |
| 552 | WAFER COUNTER(2)..825/H | DS1180-000647-13 |
| 553 | LAMP 201HS-D2 | CT1380-101522-13 |
| 554 | GUIDE,LONG PIN WRAP | MB3M10-409091-21 |
| 555 | CIRCULATOR..INR-244-215B (29 | CT2980-190513-14 |
| 556 | C/S Y MOTOR DRIVER KIT..NP8750 | CT1380-104612-11 |
| 557 | LAMP..T250 | CT2980-093289-12 |
| 558 | VALVE ASSY,PV62 20340-PA24-AFL | MB3M87-055954-12 |
| 559 | MFC..780CHT-8U TICL4 50SCCM(3M | MB015-008727-1 |
| 560 | BLOWER FAN..CH-0646 | CT2980-192145-12 |
| 561 | PLATE,COOLING UPPER(LD-761-50) | ES1810-121989-11 |
| 562 | TEACHING BOX ASSY..UT5-TLN32 | DS1187-229119-13 |
| 563 | PANEL HEATER..21103454401_,211 | DS2110-228730-11 |
| 564 | XFR SYS..BR940209 8″ FORK U-2 | ES1D80-001885-12 |
| 565 | WAFER SENSOR R | DS1187-216956-11 |
| 566 | PANEL HEATER..21103455771_ | DS2110-345612-11 |
| 567 | FAN ASSY..TP120SW-U(CKA493) | DS1140-000018-11 |
