기타 파트
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순번 | 파트 명 | 파트 넘버 |
| 1 | N2 PURGE BRACKET | 0020-70645 |
| 2 | N2 PURGE MFC BRACKET | 0020-70647 |
| 3 | VALVE PLATE | 0020-70646 |
| 4 | ORF RSTR FLOW 30SLM N2 IN CAJON 1/4VCR | 3510-01034 |
| 5 | CABLE ASSY, N2 PURGE MFC PIGTAIL | 0150-76014 |
| 6 | FTG TBG ADPTR NW25 X 1/4FVCR SST | 3300-02642 |
| 7 | HOSE RETURN RIGHT CHILLED | 0040-13134 |
| 8 | MANIFOLD RIGHT CHILLED FACILITIES | 0040-75820 |
| 9 | HOSE, SUPPLY LEFT, CHILLED | 0040-13133 |
| 10 | MANIFOLD, LEFT, CHILLED FACILITIES | 0040-75821 |
| 11 | BRKT, VALVE, CHMB A/C, CENTURA CMF | 0020-75449 |
| 12 | BRKT, VALVE, CHMB B/D, CENTURA CMF | 0020-75450 |
| 13 | CABLE HOLD DOWN | 0020-22635 |
| 14 | CLAMP 2″ & 1.5″ PIPE | 0020-24319 |
| 15 | BRACKET N2 REGULATOR ETCH | 0020-39575 |
| 16 | SW DET CA .01 X 1AWG WIRE MTL SST 304 | 1270-01392 |
| 17 | Pressure Switch Bracket, MNT Centura MF | 0020-04637 |
| 18 | SWITCH ADAPTER | 1270-01555 |
| 19 | TERM BLK 2P 2ROW 16-14AWG 250V | 1290-01034 |
| 20 | TERM BLK 4P 2ROW 16-14AWG 250V | 1290-01194 |
| 21 | FTG BULKHEAD 3/8 | 3300-01648 |
| 22 | FORE LINE XFER | 0040-70199 |
| 23 | GAUGE 2” DRY 30/100 PSI 1/4″MALE VCR | 3310-01098 |
| 24 | GAUGE PRESS -.1 TO .7MPA/30″HG-100PSI | 0190-14247 |
| 25 | TERM JUMPER 2 | 1290-01068 |
| 26 | RGLTR AIR PRESS 5-100 PSIG NON-RELEIVING | | 1190-01007 |
| 27 | FLANGE ROUGHING LINE TRANSFER CHAMBER | 0040-13013 |
| 28 | FORELINE 316L SST XFER CHAMBER CENTURA | 0050-75078 |
| 29 | FTG BLWS SECTION FLEX NW40 X NW40 | 3300-02130 |
| 30 | FTG TBG EL 1/2T .41 ID SST VCR 90 | 3300-02217 |
| 31 | FTG TBG CONN 1/2VCR X 3/8SWGLK SST | 3300-04374 |
| 32 | MOUNT DOOR TRANSFER SLIT | 0020-20341 |
| 33 | PIVOT TRANSFER SLIT VALVE | 0020-20342 |
| 34 | TRANSFER SLIT VALVE ASSY | 0010-20021 |
| 35 | BLANK SLIT VALVE | 0020-20558 |
| 36 | CLAMP TRANSFER CHMBR | 0020-36419 |
| 37 | NUT CLAMP TRANSFER CHMBR | 0020-36418 |
| 38 | STUD,CLAMP TRANSFER CHMBER | 0020-36420 |
| 39 | PLATE, BLOCKOFF 1.40 DIA TRANSFER CHAMBE | 0020-40117 |
| 40 | BLANK-OFF POSIT. E/F NON END | 0020-40564 |
| 41 | HOLDOWN RING,VIEWPORT | 0030-70084 |
| 42 | Cover Transfer Viewport Lens | 0020-20462 |
| 43 | SHOE,HANDLE, TRANSFER CHAMBER | 0020-41012 |
| 44 | SHOE, HANDLE, TRANSFER CHAMBER | 0020-41008 |
| 45 | BRACKETHARNESS CONNECTOR HP TRNFR | 0020-20838 |
| 46 | CABLE ASSEMBLY,ROBOT TOP MOTOR | 0150-35226 |
| 47 | BRACKET, MAGNETIC SWITCH | 0020-76516 |
| 48 | STDF M/F 1/4 HEX X 2″L 6-32 THD SST | 3790-01550 |
| 49 | INSULATOR CONNECTOR HARNESS | 0020-20840 |
| 50 | INSULATOR COVER HARNESS HP TRNFR & BUF | 0020-20839 |
| 51 | ASSY, MAGNETIC SWITCH | 0090-35002 |
| 52 | INSULATOR MAG SWITCH | 0020-20929 |
| 53 | ORING ID 2.859 CSD .139 VITON 75 DURO | 3870-01234 |
| 54 | ORING ID 4.109 CSD .139VITON75 DURO | 3870-01122 |
| 55 | ORING ID 5.734 CSD .139 VITON 75DURO | 3700-01072 |
| 56 | ORING ID 8.234 CSD .139 VITON 75DURO | 3700-01389 |
| 57 | ORING ID 7.234 CSD .139 Viton 75DURO BRN | 3700-01509 |
| 58 | ORING ID 7.484 CSD .139 VITON 75 DURO BRN | 3700-01504 |
| 59 | ORING ID 11.984 .139 CSD VITON 75 DURO | 3700-01374 |
| 60 | ORING ID 28.0 CSD .210 VITON 75DURO. | 3700-01426 |
| 61 | ORING ID 4.984 CSD .139 VITON 75DURO BRN | 3700-01427 |
| 62 | ORING ID 8.234 CSD .139 VITON 75DURO BLK | 3700-01389 |
| 63 | ORING ID .674 CSD .103 VITON 75DURO BRN | 3700-02044 |
| 64 | ORING ID 4.109 CSD .139VITON75 DURO | 3700-01122 |
| 65 | ORING ID 6.734 CSD .139VITON75 DURO | 3700-01134 |
| 66 | ORING ID 4.484 CSD .139 VITON 75DURO BRN | 3700-01828 |
| 67 | ASSY OPERATOR CONTROL CENTURA | 0010-20813 |
| 68 | MOUNT LEVELING 3/4-10X9 0LX3 DIA STL Z | 3480-01174 |
| 69 | MAINFRAME FOOT | TBA |
| 70 | 1/8 GREEN 200M | for 0140-75013 |
| 71 | 1/8 RED 200M | for 0140-75013 |
| 72 | 1/4 ORANGE 200M | for 0140-75013 |
| 73 | 1/4 WHITE 200M | for 0140-75013 |
| 74 | 1/4 BLACK 200M | for 0140-75013 |
| 75 | 1/4 T-BLUE 200M | for 0140-75013 |
| 76 | 3/8 BLACK 200M | for 0140-75013 |
| 77 | 3/8 T-BLUE 200M | for 0140-75013 |
| 78 | ORING ID 2.859 CSD .139 VITON 75 DURO BLK | 3700-01234 |
| 79 | ORING ID 17.955 CSD .210 VITON 75 | 3700-01136 |
| 80 | SEAL CTR RING ASSY NW160 W/VITON | 3700-01864 |
| 81 | ORING ID 2.859 CSD .139 VITON 75 DURO BLK | 3700-01234 |
| 82 | ORING ID 4.989 CSD .070W VITON 75 | 3700-01401 |
| 83 | ORING ID 1.359 CSD .139 VITON 75DURO BLK | 3700-01259 |
| 84 | ORING ID 4.100 CSD .210 VITON 75DURO | 3700-01546 |
| 85 | O RING ID 2.859 CSD .139 VITON 75 BROWN | 3700-01508 |
| 86 | ORING ID 2.484 CSD .139 VITON 75DURO BRN | 3700-01545 |
| 87 | CLAMP BHD KIOO-BC 123 ID 39THKAL 00 HARDWARE | 0690-01797 |
| 88 | SEAL CTR RINGASSY NW25 ORING | 3700-01089 |
| 89 | SEAL CTR RINGASSY NW25 RING | 3700-01352 |
| 90 | SEAL CTR RING ASSY NW40 | 3700-01087 |
| 91 | FTGFLANGE BLANKOFF | 3300-01346 |
| 92 | FTGFLANGE BLANK-OFF NW40 216ODX20THK SST304 | 3300-01347 |
| 93 | CLAMP Kl 50-BC BULKHEAD W/ 6BOLTS NW40 NO HARDWARE | 0690-01812 |
| 94 | AMAT Logo Nameplate | 0020-40900 |
| 95 | Center Seal O-ring | 3700-01864 |
| 96 | Flange Blank-off | 3300-03223 |
| 97 | Flange Clamp | 0690-01796 |
| 98 | Holddown Ring | 0030-70084 |
| 99 | LL Door Stop | 0020-75037 |
| 100 | O-ring AS-233 | 3700-01234 |
| 101 | Viewport Cover | 0020-20462 |
| 102 | BAFFLE ASSEMBLY | 0010-76932 |
| 103 | WSHRFLAT #10 6400DX.1901DX.060THK SST | 3880-01154 |
| 104 | BRG BALL 1/20DX1/41DX3/16W IROW FLGDABEC-7 SST | 3060-01076 |
| 105 | LINKAGE CARRIAGE DOOR MECH | 0020-40360 |
| 106 | CARRIAGE, LHS | 0020-40716 |
| 107 | PLATE, SIDE, LHS | 0020-41193 |
| 108 | BRG RLR CAM FLR 3/4 DA CRNED .500 WIDE .25 BORE | 3060-01457 |
| 109 | SCR CAP SKT HD 6-32 X 1/41- HEX SKT SST SLVR-PLT | 3690-01889 |
| 110 | SCRMACH SHLDR 10-32X.24950DX12L HEX SKT SST303 | 3690-01641 |
| 111 | USE 3690-01914 SCR CAP SKT HD 8-32 X 1/2L SLVR-PLT | 3690-01862 |
| 112 | SPCR SHAFT 375 OD 2501D 031 SST | 3790-01343 |
| 113 | SHAFT, CAM FOLLOWER DOOR MECH | 0020-40301 |
| 114 | SPREXT 4.OOFL X .7500D X .085WtRE DA SST | 3780-01165 |
| 115 | SPR CPRSN .250FLX .2100D X .026WlRE DA SST | 3780-01169 |
| 116 | STDF FIF 1/4HEX 6-32 X 3/8L SST NO-FINISH | 3790-01492 |
| 117 | WSHR LKG SPLIT #1/4 48700 X .260DX .062THK SST | 3880-01129 |
| 118 | WSHRLKG SPLIT #8 .2930D X .1741D X .040THK SST | 3880-01024 |
| 119 | ECCENTRIC,CAM FOLLOWER | 0020-10200 |
| 120 | CMFLR W/ROD .625 DIA 1/4-28 HEX | 3150-01007 |
| 121 | NUTHEX JAM 1/4-28 X 5/32THK psvr-ssr | 3500-01048 |
| 122 | CARRIAGE, RHS | 0020-40717 |
| 123 | PLATE, SIDE, RHS | 0020-41194 |
| 124 | NUT HEX FULL 1/4-28 X 7/32L SST PSVT | 3500-01049 |
| 125 | SCRCAP SKT HD 8-32 X 3/8L HEX SO SST SLVR-PLT | 3690-01895 |
| 126 | LLC CARRIAGE SUPPORT | 0020-40888 |
| 127 | RETAINER SPRING DOOR MECH | 0020-40359 |
| 128 | STOP BEARING MOUNT LLC DOOR | 0020-40729 |
| 129 | HARNESS ASSY SMIF WB LLB INTRCNCT PHASE 2 FACIL | 0140-02655 |
| 130 | HARNESS ASSY SMIF WB LLB INTRCNCT PHASE 2 FACIL | 0140-02654 |
| 131 | COVER, DET ADJUST ASSY FAST WAFER | 0021-76309 |
| 132 | Support Bracket | 0020-75998 |
| 133 | Viewport Detector Clamp | 0020-13652 |
| 134 | COVER ANALOG SYNC PWA FAST WAFER MAPPING | 0040-76532 |
| 135 | BRACKET, ANALOG SYNC PWA, FAST WAFER MAPPING | 0040-13149 |
| 136 | STDF MIF 1/4 HEX X 3/8L SST 6-32THD | 3790-01530 |
| 137 | STDF MIF 1/4HEX 6-32 X 1.25LSST NO-FINISH | 3790-01414 |
| 138 | WSHR FLAT #4 .312OD X .125ID X .031THK SST | 3880-01004 |
| 139 | WASHER LKG SPLIT #4 .203ODX.120 ID X.025 THK SST | 3880-01022 |
| 140 | WSHRFLAT #6 .375OD X .149ID X .031THK SS | 3880-01006 |
| 141 | WSHRLKG SPLIT #6 .25OD X .148ID X .031THK SST | 3880-01023 |
| 142 | COVER BRKT, DET ADJUST ASSY FAST WAFER | 0040-76439 |
| 143 | DETECTOR ASSY LEFT FAST WAFER MAPPING | 0010-76859 |
| 144 | DETECTOR ASSY, RIGHT FAST WAFER MAPPING | 0010-76858 |
| 145 | SCRMACH PAN HD 6-32 X 1/4L PHIL SST SLVR | 3690-02289 |
| 146 | SCREW MACH CAP HEX SKT (4-40 X 1/4L SST SLVER) | 3690-01869 |
| 147 | INSERT,DETECTOR VIEWPORT | 0020-04766 |
| 148 | ORING ID 4.989 CSD .070 VITON 75DURO BLK UHP | 3700-02919 |
| 149 | WBLL BRKT, LED BOARD MOUNT, FAST WAFER MAPPING | 0020-13963 |
| 150 | COVER WAFER MAP LED, FAST WAFER MAPPING | 0020-13965 |
| 151 | ASSY, LED-WB, FAST WAFER MAPPING | 0090-76037 |
| 152 | FTG TBG ELBOW 118TX 118MNPT1-TOUCHQK-DISCON | 3300-02279 |
| 153 | LLAVENT SIDE NARR LLC | 0050-76033 |
| 154 | LLB VENT SIDE NARR LLC | 0050-76034 |
| 155 | VENT VALVE LINE BOTTOM NARR LLC | 0050-76036 |
| 156 | VENT VALVE LINE TOP NARR LLC | 0050-76035 |
| 157 | GAS LINE DIFFERENTIAL PLUMBING 3 OF 3 | 0050-20740 |
| 158 | VALVE BRKT DIFFERENTIAL PLUMBING | 0020-24093 |
| 159 | Flex Hoss 1/4 inch VCR | 3300-03211 |
| 160 | FTG TBG UNION TEE 14200OSI 14VCR-M/M/M SST | 3300-01939 |
| 161 | HARNESS SMIF INTEGRATED WB LLA INTRCNT | 0140-76877 |
| 162 | HARNESS SMIF INTEGRATED WB LLB INTRCNT | 0140-76878 |
| 163 | Vacuum Tube TEE, NW40 Flanges and NW25 Reducer + Convectron Gauge | 0040-20433 |
| 164 | FTG BLWS SECTION FLEX NW40 X NW40 3.94 | 3300-02130 |
| 165 | ASSY, SENSOR WAFER SLIDE RECEIVER | 0090-76035 |
| 166 | ASSY SENSOR WAFER PRESENT/WAFER SLIDE | 0090-76034 |
| 167 | VIEWPORT COVER TRANSFER CHAMBER | 0020-20462 |
| 168 | CLAMP, RELIEF, STRAIN WBLL | 0020-13978 |
| 169 | WSHRLKG SPLIT #8 2930D X .1741D X .040THK SST | 3880-01024 |
| 170 | ALIGNMENT TOOL FROG LEG ROBOT | 0040-20095 |
| 171 | ARM FROG LEG 5200 | 0020-35033 |
| 172 | WING FROG LEG 5200 | 0020-35032 |
| 173 | ORING ID 4.484 CSD -139 VITON 75 DURO | 3700-01381 |
| 174 | ORING ID 6.734 CSD .139VlTON75 DURO | 3700-01134 |
| 175 | USE 3690-01914 SCR CAP SKT HD 8-32 X 1/2)- SLVR-PLT | 3690-01862 |
| 176 | SCRCAP SKT HD 8-32 X 3/81- HEX SKT SST SLVR-PLT | 3690-01895 |
| 177 | WSHR BLVL.8750D X -1901D X 720T SST302 | 3880-01085 |
| 178 | SHAFT WING | 0020-35088 |
| 179 | AMAT HTR TAPE SLF-RGLTG 120 VAC | 1010-01040 |
| 180 | HARNESS ASSY,DTLR STATUS GPLIS | 0140-38487 |
| 181 | CABLE ASSY TEOS DTLR TO SYSTEM | 0150-38911 |
| 182 | CABLE ASSY TEPO DTLR TO SYSTEM | 0150-38912 |
| 183 | CABLE ASSY TEB DTLR TO SYSTEM | 0150-38913 |
| 184 | SENSO-DG-PRPJ CABLE ASSY DTLR JUMPER | 0150-38914 |
| 185 | MODIFICATION FITTING ELBOW | 0015-35222 |
| 186 | FTGHOSE ADPTR 3/8HOSE TO 114TUBE SST BARB | 3300-03984 |
| 187 | ORING ID 5.359 CSD .139 VITON 75DURO BLK | 3700-01370 |
| 188 | FTG FLG 2-3/4 PD X .5″ SST BLK NON-ROT CF | 3300-02240 |
| 189 | FTG ADPTR FLG 1.330D TO MALE 1/4VCR SST | 3300-03919 |
| 190 | WINDOW, FRONT | 0200-35388 |
| 191 | N2 BAFFLE | 0020-39658 |
| 192 | ORING ID 10.984 CSD .139 VITON 75DURO BLK | 3700-01272 |
| 193 | ORING ID 8.734 CSD .139 VITON 75 DURO BLK | 3700-01429 |
| 194 | COVER, TOP, MULTI-SLOT COOLDOWN | 0021-01730 |
| 195 | CLAMP, WINDOW with 0020-39799 | 0020-39701 |
| 196 | ASSY, 8″ COOLING CASSETTE COOLDOWN ( Condition: SECOND SOURCE NEW | 0010-37264 |
| 197 | High temperature tie 130°C 140mm | 1330-01040 |
| 198 | Al tape 180 ft (55 m) roll of aluminum tape for attaching heating cables and thermostat sensors to pipes and tanks. Minimum installation temperature: 32°F (0°C). Dimensions: 2.5 in wide, 5 mils thick | |
| 199 | PANEL, CONNECTOR CENTURA CMF VRZ VHP ROBOT | 0040-00637 |
| 200 | SCREW CAP | |
| 201 | SPRCPRSN .750FL X .120OD X .020WIRE-DIA | 3780-01106 |
| 202 | SCR MACH SHLDR 4- 40X.1245ODX3/16L HEX | 3690-02257 |
| 203 | GAS LINE VENT CENTURA LLA | 0050-20708 |
| 204 | GAS LINE VENT LINE CENTURA LLA | 0050-20751 |
| 205 | GASLINE DUAL VALVE LLC | 0050-20662 |
| 206 | DIFFERENTIAL PLUMBING LLB | 0050-20724 |
| 207 | ASSY FILTER/DIFFUSER LOADLOCK | 0190-21067 |
| 208 | SIGNAL TOWER 4 COLOR NW40 316L | 0090-03429 |
| 209 | CABLE ASSY, PHOTO HELIX 2, UHP | 0090-09139 |
| 210 | CABLE ASSY, CHMBR PNEU, DI/O CENTURA | 0150-10093 |
| 211 | CABLE ASSY, TC CHAMBER TRAY INTERFACE | 0150-20641 |
| 212 | CABLE ASSY, LLA WAFER MAP CASS.. SENSE | 0150-20509 |
| 213 | CABLE ASSY, LLB WAFER MAP CASS.. SENSE | 0150-20510 |
| 214 | CABLE ASSY, LLA LED PWR | 0150-20238 |
| 215 | CABLE ASSY, LLB LED PWR | 0150-20239 |
| 216 | HARNESS ASSY, LLC A WAFER MAP SENSE L/R | 0140-20253 |
| 217 | HARNESS ASSY, LLC B WAFER MAP SENSE L/R | 0140-20254 |
| 218 | VALVE, TWO STAGE INLINE NW40 316L | 0190-13041 |
| 219 | MKII-XT WELDMENT, FORELINE | 0040-76148 |
| 220 | ELBOW, LLC EXHAUST TTF, CENTURA COMMON | 0040-13264 |
| 221 | KF25 90 ELBOW MANUAL VALVE | |
| 222 | 1/8 poly line color trans 200m | |
| 223 | N2 PURGE CHECK VALVE | |
| 224 | N2 PURGE RESTRICTOR 5SLM | |
| 225 | CABLE, HARNESS MFC | 0150-76817 |
| 226 | BRKT MID SUPPORT, O3 DIVERTER CLAMP, BRACKET, O3 DIVERT, GAS PALLET | 0021-10968 0021-10969 |
| 227 | PAD QUARTZ UPPER RING | 716-004655-002 |
| 228 | RING,CNFMT,TOP | 716-443083-404 |
| 229 | BAF,LWR OF THREE,SIC,CON | 716-140125-200 |
| 230 | SLIT ACTURATOR CYLINDER WITH SENSOR CABLE & SPEED CON | 3020-01052 |
| 231 | ASSY UNIVERSAL WBLL CASSETTE PLATFORM | 0010-22664 |
| 232 | ASSEMBLY, LIFT CONFIG, MULTI COOL DOWN INDEXER | 0010-37349 |
| 233 | WIDEBODY INDEXER ASSY | 0010-40073 |
| 234 | ASSY UNIVERSAL WBLL CASSETTE PLATFORM | 0010-22664 |
| 235 | ASSEMBLY, LIFT CONFIG, MULTI COOL DOWN INDEXER | 0010-37349 |
| 236 | Centura system controller rack assembly | |
| 237 | Backplane board 4종 | |
| 238 | EMO assembly | |
| 239 | All ribbon cable | |
| 240 | > All Front circuit breaker 4 chamber | |
| 241 | > 1kva TR 1ea | |
| 242 | > 3kva TR 1ea | |
| 243 | > 4kva TR 1ea | |
| 244 | PCB ASSY ANALOG SYNC DETET | 0100-20066 |
| 245 | CABLE ASSY LLA WAFER MAP CASS SENSE | 0150-20509 |
| 246 | CABLE ASSY LLB WAFER MAP.CASS SENSE | 0150-20510 |
| 247 | BLANK FACE CENTURA 5200 | 0020-40905 |
| 248 | Harness Cable DxZ | 0140-38233 |
| 249 | DxZ Motor Belt | 3080-01063 |
| 250 | Lead Screw(OEM Overhual) | 3690-03269 |
| 251 | 5-phase Motor(OPM NEW) | 0190-35463 |
| 252 | Harness Cable DxZ | 0140-38233 |
| 253 | DxZ Motor Belt | 3080-01063 |
| 254 | Lead Screw(OEM Overhual) | 3690-03269 |
| 255 | 5-phase Motor(OPM NEW) | 0190-35463 |
| 256 | Centura HOIST 2nd NEW | |
| 257 | CxZ Heater Driver Max 30A ( Second Source New ) | 0190-35875 |
| 258 | CxZ Vacuum Line Kit (ChA/B/C/D) 2nd new. Includes the ff 0050-39573 ChA/B 0050-32286 ChC/D 0050-37556 ChA/B/C/D 0050-37557 ChA/B/C/D 0040-09217 ChA/B/C/D | |
| 259 | Drip and In-line Spill Sensor Kit (New | |
| 260 | Drip, Swagelok kit (6-Weeks) | |
| 261 | Divert valve (Overhual | |
| 262 | Watlow All Cable | |
| 263 | CxZ Vacuum Line Kit (ChA/B/C/D) 2nd new. Includes the ff 0050-39573 ChA/B 0050-32286 ChC/D 0050-37556 ChA/B/C/D 0050-37557 ChA/B/C/D 0040-09217 ChA/B/C/D | |
| 264 | Drip and In-line Spill Sensor Kit (New | |
| 265 | Drip, Swagelok kit (6-Weeks) | |
| 266 | Divert valve (Overhual | |
| 267 | Watlow All Cable | |
| 268 | CxZ Hinge 2nd NEW | |
| 269 | CxZ Chamber Cover 2nd NEW | |
| 270 | Cable EV manifold 2 | 0150-35616 |
| 271 | Cable EV manifold 1 | 0150-35615 |
| 272 | Seriplex comm cable assy CH A,B,C,D | 0150-35853 |
| 273 | Seriplex comm cable assy CH A,B,C,D | 0150-35854 |
| 274 | Seriplex comm cable assy CH A,B,C,D | 0150-35855 |
| 275 | Seriplex comm cable assy CH A,B,C,D | 0150-35856 |
| 276 | Cable i/o power distribution | 0150-10328 |
| 277 | APC gas panel comm 60ft | 0150-10505 |
| 278 | Harness assy exhaust interlock | 0140-10033 |
| 279 | press. Trans. HRN 11-13 | 0140-10034 |
| 280 | harness press XDCR seriplex (APC)/ VME 2 | 0140-09996 |
| 281 | Harness pressure tranducer 7-10 | 0140-10035 |
| 282 | Foreline TC gauge (5200), GAUGE TC 1-1000 MTORR METALTUBE 1/8″IPS | 3310-01071 |
| 283 | Lid cover interlock switch | 0150-10454 |
| 284 | PLATE, CAPING, ATM. PORT | 0020-33351 |
| 285 | WELDMENT,DUAL BARATRON PORT,DXZ GIGA-FILL | 0050-32387 |
| 286 | CLAMP, DXZ, CXZ, LID, OVER PRESSURE | 0021-01010 |
| 287 | CABLE ASSY, LIMIT SWITCH-B | 0150-36950 |
| 288 | CABLE,HEATER LIFT,GIGA-FILL SACVD | 0150-00490 |
| 289 | HARNESS ASSY GIGAFILL CHAMBER | 0140-01741 |
| 290 | HARNESS ASSEMBLY, CENTURA DXZ, RPS/DPA/EP ADAPTOR | 0140-06248 |
| 291 | CABLE ASSY GIGA LID COVER INTRL | 0150-00235 |
| 292 | OPTO sensor | 0100-09042 |
| 293 | Top robot cable harness | 0150-18058 |
| 294 | UDX5114 5-Phase Driver ( Robot upper/lower motor driver forMainframe ) | |
| 295 | UDX5114 5-Phase Driver ( Loadlock A/B motor driver for Mainframe ) | |
| 296 | UD2115 2-Phase Driver | |
| 297 | MOUNTING BRACKET | 0020- 13602 |
| 298 | Cable Assembly MainframePneunatics | 0150-20628 |
| 299 | AMAT PCB INTERCONNECTOR ASSEMBLY | 0100-76065 |
| 300 | MAINFOLD LOW PRESSURE PNEUMATICS | 0190-76204 |
| 301 | MAINFOLD HIGH PRESSURE PNEUMATICS | 0190-76205 |
| 302 | CHAMBER PNEUMATIC SOLBLOCK ASSY | |
| 303 | INSERT LLA LLB SLIT VALVE | 0020- 35057 |
| 304 | INSERT SLIT VALVE | 0021- 04277 ( 0020-20587 ) |
| 305 | CXZ Chamber Body | 0021-09735 |
| 306 | VALVE PNUM DIAPH NO Overhual | 3870-02153 |
| 307 | Swageloke, M/M NC Valve | |
| 308 | 5-Phase Driver Bracket | |
| 309 | 0150-10073 | 0150-10073 |
| 310 | 0150-13048 | 0150-13048 |
| 311 | OTF Assy | 0010-76764 |
| 312 | OTF Assy | 0010-76765 |
| 313 | Centura SMIF Kit. Includes the following parts > 0040-33711 – 1ea > 0150-06051 – 2ea > 0140-02654, 02655 – 2ea > SMIF RS232 Cable 75FT – 2ea > 0040-75661 – 1ea > 0190-07662 – 2ea > 0021-07573,07574 – 2ea > 0021-76742 – 2ea | |
| 314 | OKB3, Smoke Sensor | |
| 315 | INSULATOR,CATHODE BASE,200MM,DPS | 0021-09511 |
| 316 | PLATE REFLECTOR 200MM XE CHAMBER RTP | 0021-35008 |
| 317 | INSERT RING.SILICON,200MM,NOTCH(2),SI/QT | 0200-10446 |
| 318 | RING, CAPTURE, CERAMIC,SEMI NOTCH NO FLA | 0200-00945 |
| 319 | LIFT PIN, .149 DIA TRIANGULAR | 0200-36373 |
| 320 | RING, CAPTURE C-ESC, SNNF, 200MM, METAL | 0200-00250 |
| 321 | SEAL, CTR RING ASSY | 3700-02322 |
| 322 | WELDMENT, BELLOWS ASSY, LOWER, GIGA-FILL | 0040-36300 |
| 323 | SILICON INSERT, RETAINER RING, RTP XE | 0020-13257 |
| 324 | TEFLON SEAL, SIGMA THROTTLE VALVE | 0021-17875 |
| 325 | PIN, SPACER WXZ+ | 0200-00353 |
| 326 | SCREW, HEX, CAP SKT HD, 10-24X15/16L, CA | 0015-00850 |
| 327 | CONN COAX ADPTR STR SKT TYPE 716 | 0720-02773 |
| 328 | CLAMP,BULKHEAD,RF PIN,CATHODE,DPS | 0021-09445 |
| 329 | SCREW, PAN HD .190-32, HAYNES | 0021-38786 |
| 330 | BRG LINEAR BALL .875″ OD .5″ BORE .046 | 3060-01205 |
| 331 | RETAINER,O-RING,2-204,DPA | 0021-10597 |
| 332 | GSKTKIT NW-40 MDC | 3320-01057 |
| 333 | CAPTIVE SCREW,CLAMP RING | 0015-35201 |
| 334 | INSERT,SILICON,CH REFLECTOR,RTP CHAMBER | 0200-35362 |
| 335 | SEAL, GASKET | 0190-00003 |
| 336 | 60AMP 600V 10 FULLWAVE RECTIFIER MODULE | 0840-00080 |
| 337 | HOUSING, GAS FEED, DPS A3 CHAMBER | 0200-35295 |
| 338 | NOZZLE, 99.5% ALO, 2.55L, 1.5%, ULTIMA, | 0200-18093 |
| 339 | WINDOW, ENDPOINT, INNER DPS MEC | 0200-39133 |
| 340 | HSINK THERMO CONDUCTIVE .001THICKX24WX14 | 0020-16279 |
| 341 | PIN,LIFT (QUARTZ),MOD II | 0200-35486 |
| 342 | LIFTING PIN 200MM | 0200-09071 |
| 343 | WASHER, NOZZLE, ULTIMA HDPCVD | 0020-18899 |
| 344 | HOLDER, PIN, HDP-CVD | 0020-31064 |
| 345 | RING, TEFLON, GUARD THV HDP-CVD | 0020-18269 |
| 346 | RETAINER, SEAL, SIGMA THROTTLE VALVE | 0021-06661 |
| 347 | O-RING | 3700-02945 |
| 348 | PCB ASSEMBLY, OPTO SWITCHPCB ASSEMBLY, OPTO SWITCH | 0100-09042 |
| 349 | WINDOW, RECESSED ENDPOINT, 4MM APERTURE | 0200-35801 |
| 350 | SCREW,LID LINER TXZ | 0200-35611 |
| 351 | SEAL | 3700-01547 |
| 352 | PUL TMG BELT 1/5P 15GRV .313 BORE DBL | 3610-01086 |
| 353 | FLTR CARTRIDGE 9-3/4 L 25 MICRON | 4020-00717 |
| 354 | REV P2 KTC 06-12-97 | 0150-76282 |
