LAM
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| LAM PART | |||
| N0 | 제 품 명 | Part. No | 재 질 |
| 1 | COVER RING Q’TZ HP | 716-008645-001 | Q’TZ |
| 2 | RING Q’TZ UPPER HPT | 716-007136-002 | Q’TZ |
| 3 | RING CONFINEMENT BOTTOM | 716-443084-403 | Q’TZ |
| 4 | RING CNFMT ONE PIECE HPT | 716-016394-001 | Q’TZ |
| 5 | RING CONFINEMENT TOP | 716-443083-404 | Q’TZ |
| 6 | RING Q’TZ UPPER | 716-004655-002 | Q’TZ |
| 7 | RING EDGE BOTTOM | 716-331089-001 | AL2O3 |
| 8 | RING EDGE TOP | 716-331088-007 | Q’TZ |
| 9 | ESC | 716-094523-281-E | CERAMIC |
| 10 | NOZ INJ 8*0.55-45DEG RD | 716-012639-024 | Q’TZ |
| 11 | WDO GAS INJ FACE SEAL Q’TZ NSG | 716-012640-011 | Q’TZ |
| 12 | CERAMIC CHAMBER LINER | 716-041983-001 | CERAMIC |
| 13 | GDP CERAMIC | 716-330892-007 | CERAMIC |
| 14 | UNIFORMITY RING CERAMIC | 716-331051-002 | CERAMIC |
| 15 | STRIPPER CERAMIC FOCUS RING | 716-460216-001 | CERAMIC |
| 16 | WINDOW Q’TZ | 716-011009-001 | Q’TZ |
| 17 | TCP Q’TZ 9600 XX | 716-330891-002 | Q’TZ |
| 18 | RING EDGE BOTTOM | 716-026652-002 | Q’TZ |
| 19 | RING EDGE TOP | 716-031257-522 | Q’TZ |
| 20 | PL PLASMA DISTRN BIFFLE PLATE | 716-000941-001 | Q’TZ |
| 21 | INNER FOCUS RING | 716-443129-001 | AL2O3 |
| 22 | RING HOT EDGE SI SGL XTAL 8″ | 716-140139-311 | SI |
| 23 | ELECTRODE SILICON POLISH HCB 8 IN | 839-011907-913 | SI |
| 24 | WINDOW Q’TZ | 716-011009-001 | Q’TZ |
| 25 | DISK TOP GAS | 716-331157-014 | Q’TZ |
| 26 | PL SH HD CER 21 HOLE 9600 PTX | 716-330892-007 | CERAMIC |
| 27 | RING FOC ESC 8″ | 716-140118-001 | CERAMIC |
| 28 | BAF LWR OF THREE SIC CONDTN | 716-140125-200 | CERAMIC |
| 29 | UPPER ELECTRODE SILICON | 839-011907-334 | SI |
| 30 | UPPER ELECTRODE SILICON | 839-011907-222 | SI |
| 31 | UPPER ELECTRODE SILICON HPT | 839-443215-502 | SI |
| 32 | FOCUS RING ESC INNER 8 | 716-443129-001 | AL2O3 |
| 33 | RIING UPPER CLAMP RING | 716-443217-002 | SIC |
| 34 | RING CLAMP UPPER ELECTRODE | 715-443098-001 | AL6061 |
| 35 | OUTER FOCUS RING | 715-443130-001 | AL6061 |
| 36 | UPPER SEAL PLATE | 715-140124-002 | AL6061 |
| 37 | WDO Q’TZ HTD ENDPT | 716-031052-004 | Q’TZ |
| 38 | INNER CHAMBER VAT 65 TRNSN MAF | 839-495013-001 | AL6060 |
| 39 | LINER CHAMBER TRNSN MANF/A | 715-495014-001 | AL6060 |
| 40 | TCP 9600 PTX-GROUND RING | 715-330889-002 | AL6060 |
| 41 | LINER CHAMBER TRNSN MANF | 714-495015-001 | AL6060 |
| 42 | BRJT CHAMBER LIN 9600 PTX | 715-330394-010 | AL6060 |
| 43 | WDO Q’TZ HTD ENDPT | 715-032012-004 | AL6060 |
| 44 | WDO CHAMBER | 715-031984-003 | AL6060 |
| 45 | GATE DOOR | 823-442064-003 | AL6060 |
| 46 | INSR GTV ANZD ALL16 | 715-442066-002 | AL6060 |
| 47 | CERAMIC ETCH RING | 716-330045-382-M | AL2O3 |
| 48 | CONFINEMENT RING | 716-140236-003 | Q’TZ |
| 49 | CERAMIC PIN | 716-074512-002 | AL2O3 |
| 50 | CERAMIC EDGE RING | 716-140139-001 | AL2O3 |
| 51 | Q’TZ WINDOW | 716-540198-001 | Q’TZ |
| 52 | RING HOT EDGE 15 ESC STD 6″ | 716-140163-261 | SI |
| 53 | FOCUS RING | 716-443234-002 | Q’TZ |
| 54 | COUPLING RING | 716-140469-002 | Q’TZ |
| 55 | ELECTRODE INSULATOR | 716-011624-010 | Q’TZ |
| 56 | CLAMP BOT | 716-031535-008 | sample |
| 57 | EDGE RING | 716-443086-401 | Q’TZ |
