| | AMAT PART | | |
| | | | |
| NO | 제 품 명 | Part. No | 재 질 |
| 1 | INSULATOR Q’TZ 8 SNNF PC ⅱ PINLESS Q | 0200-00902 | Q’TZ |
| 2 | PEDESTAL SHIELD 8″ PRECLEAN | 0020-22844 | AL |
| 3 | GAS TRENCH COVER | 0020-26967 | AL |
| 4 | SHIELD LOWER T/TIN | 0020-26588 | AL |
| 5 | PEDESTAL PICLL 8 SNNF | 0020-27123 | SUS |
| 6 | AMAT SEB CHAMBER TEFLON INSULATOR | 0020-04181 | |
| 7 | PLATE STRIKE ALN GIGA-FILL SACVD | 0021-06491 | |
| 8 | GAS DISTRIBUTION PLATE(SUPPER E) | 0200-00410 | Q’TZ |
| 9 | SHADOW RIING | 0200-36696 | Q’TZ |
| 10 | INSULATOR Q’TZ (SUPPER E) | 0200-10073 | Q’TZ |
| 11 | NGK SACVD REV P1 | 0200-35582 | CERAMIC |
| 12 | SACVD CXZ REV P2 | 0200-10648 | CERAMIC |
| 13 | FOCUS RING | 0200-00137 | CERAMIC |
| 14 | CAPTURE RING | 0200-00247 | CERAMIC |
| 15 | MANOMETER | 0200-35293 | Q’TZ |
| 16 | COVER LOW PROFOLE HDP-CVD ULTIMA RING 200MM | 0200-18081 | CERAMIC |
| 17 | COLLAR RING 200MM SNNF | 0200-18109 | Q’TZ |
| 18 | HDP CERAMIC INSULATOR CLAMPLESS | 0200-18090 | CERAMIC |
| 19 | Q’TZ BLADE HP ROBOT | 0200-00135 | Q’TZ |
| 20 | CERAMIC PUMPING CHANNEL | 0200-10650 | CERAMIC |
| 21 | CERAMIC C RING | 0200-35842 | CERAMIC |
| 22 | CERAMIC LOWER LINER | 0200-39274 | CERAMIC |
| 23 | BAFFLE ULTIMA TOP NOZZLE | 0200-01009 | CERAMIC |
| 24 | SIDE NOZZLE FOR FSG | 0200-18093 | CERAMIC |
| 25 | DOME DPS CHAMBER R1 ROUGH | 0200-10324 | CERAMIC |
| 26 | RTP SIC EDGE RING | 0200-36118 | SIC |
| 27 | PEDESTAL COVER | 0020-28937 8″ | Zirconia |
| 28 | Q’TZ TUBE APPLICATOR | 0200-05376 | Q’TZ |
| 29 | LIFT PIN 149 DIA TRIANGULAR | 0200-36373 | CERAMIC |
| 30 | WTM PROBE SAPPHIRE | 0190-18430 | SAPPHIRE |
| 31 | Pedestal cover | 0020-28937 8″ | AL2O3 |
| 32 | Q’TZ LOWER CHAMBER VPRS, DPS | 0200-35294 | Q’TZ |
| 33 | Ceramic insert rig | 0200-10143 | CERAMIC |
| 34 | Enhanced pumping lid isolator | 0200-10163 | CERAMIC |
| 35 | Pumping Insert Shield | 0200-10164 | CERAMIC |
| 36 | Edge Ring 8″ | 0200-35702 | CERAMIC |
| 37 | Liner Ceramic | 0200-10160 | CERAMIC |
| 38 | Sleeve Junction | 0200-00296 | CERAMIC |
| 39 | Liner Junction | 0200-10157 | CERAMIC |
| 40 | Isolator pumping lid | 0200-10144 | CERAMIC |
| 41 | Pumping Insert ring | 0200-09974 | CERAMIC |
| 42 | Ceramic insert ring | 0200-39324 | CERAMIC |
| 43 | Lift Pin | 0200-09933 | CERAMIC |
| 44 | Ceramic isolator lid | 0200-36666 | CERAMIC |
| 45 | Isolator ring Middle | 0200-00317 | CERAMIC |
| 46 | Collar Big flat | 0200-18095 | CERAMIC |
| 47 | Cover | 0200-18081 | CERAMIC |
| 48 | Top nozzle 4 hole | 0200-01009 | CERAMIC |
| 49 | Lift Pin | 0200-40156 | CERAMIC |
| 50 | CVD Lift Pin | 0200-10284 | CERAMIC |
| 51 | CVD Ceramic Lift Pin | 0200-40156 | CERAMIC |
| 52 | CVD Ceramic Lift Pin Guide | 0200-18053 | CERAMIC |
| 53 | DPS Ceramic Capture ring | 0200-04131 | CERAMIC |
| 54 | DPS Focus ring | 0200-04132 | CERAMIC |
| 55 | DPS plate gas dist lower 8.5 OD8 Q’TZ ASP PRSP | 0200-09201 | CERAMIC |
| 56 | CVD-TEOS Lift pin DLH | 0200-10074 | CERAMIC |
| 57 | CVD-SILANE Lift pin DLH | 0200-10074 | CERAMIC |
| 58 | CVD-SILANE Ceramic Collars(PP) | 0020-30287 | CERAMIC |
| 59 | CVD-TEOS edge ring | 0200-10169 | CERAMIC |
| 60 | CVD-SILANE edge ring | 0200-10169 | CERAMIC |
| 61 | CVD-SILANE Ceramic Chamber insert | 0200-39324 | CERAMIC |
| 62 | CVD-APF isolator Ceramic | 0200-03026 | CERAMIC |
| 63 | CVD-TEOS pumping ring | 0200-39289 | CERAMIC |
| 64 | CVD-TEOS isolator Ceramic FSG | 0200-00968 | CERAMIC |
| 65 | CVD-NIT 550 isolator pumping top | 0200-00402 | CERAMIC |
| 66 | CVD-NIT 550 isolator pumping middle | 0200-00403 | CERAMIC |
| 67 | CVD-NIT 550 isolator pumping bottom | 0200-00404 | CERAMIC |
| 68 | BLADE 6&8 THIN ROBOT W/O POCKET | 0200-40126 | ORIGINAL |
| 69 | BLADE 6&8 THIN ROBOT W/O POCKET | 0200-40126 | TIO2 |
| 70 | THROTTLE VALVE SET | 0010-09035 | sus |
| 71 | RING OUTER 200mm WXZ NCSR | 0200-00622 | AL2O3 |
| 72 | RING SHADOW NCSR 2.Omm EE WXZ 200mm | 0200-00847 | AL2O3(SAMPLE) |
| 73 | DXZ COVER PLATE | 0020-36629 | ALN |
| 74 | Liner Ceramic | 0200-10160 | AL2O3 |
| 75 | GAS FEED TUBE OD 6.35MM | 0200-09450 | Q’TZ |
| 76 | PINLESS Q’TZ 8″ SNNF PRECLEAN ⅱ | 0200-20426 | Q’TZ |
| 77 | window monometer port DPS MEC | 0200-39135 | ceramic |
| 78 | window ENDPOINT DPS MEC | 0200-35292 | Q’TZ |
| 79 | SCREW MACH SKT HD 10-24X 1/2L | 3690-01884 | SUS304 |
| 80 | SCREW CAP SKT HD 10-24X 1-3/8L HEX SST SL | 3690-02045 | SUS304 |
| 81 | BOLT CAPTIVE 5/16-18X 1.25L REV A | 0020-33572 | SUS304 |
| 82 | SCRCAP SKT HD 8-32X 1/2L HEX SKT SST SL | 3690-01914 | SUS304 |
| 83 | BRACKET ENDPOINT DPS MEC | 0020-34431 | SUS304 |
| 84 | CLAMP RING 8″ SNNF SST ARC SPRAYED | 0021-21946 | AL6061 |
| 85 | SHIELD AL/TI 8″ WAFER | 0020-21665 | AL6061 |
| 86 | AL SHIELD CLAMP | 0020-23041 | AL6061 |
| 87 | STAND-OFF CERAMIC DC BIAS | 0020-20126 | AL2O3 |
| 88 | ISOLATOR DC BIAS | 0020-20114 | AL2O3 |
| 89 | SAPPHIRE WINDOW | 0200-39134 | SAPPHIRE |
| 90 | GAS FEED INNER CERAMIC(METAL) | 0200-35290 | AL2O3 |
| 91 | (IL)GAS FEED OUTER CERAMIC(METAL) | 0200-35291 | AL2O3 |
| 92 | PEDESTAL Q’TZ INSULATOR | 0020-20055 | AL2O3 |
| 93 | END POINT INNER | 0200-39133 | AL2O3 |
| 94 | NITRIDE PLATE | 0040-33701 | ALN |
| 95 | Q’TZ BLADE | 0200-35004 | Q’TZ |
