| 1 | BAFFLE PLATE | 1D10-100854-15 | TEL | NEW | Ask |
| 2 | VIEW PORT | 1805-22008-11 | TEL | NEW | Ask |
| 3 | APC BUTTERFLY PLATE | 1D80-000760-11 | TEL | NEW | Ask |
| 4 | BAFFLE A 8K | 810-424110-2 | TEL | NEW | Ask |
| 5 | BAFFLE PLATE | 1D10-101398-12 | TEL | NEW | Ask |
| 6 | BOTTOM COVER | 1810-223352-11 | TEL | NEW | Ask |
| 7 | COOLING PLATE | 282183Y91211 | TEL | NEW | Ask |
| 8 | COOLING PLATE1810-224912-11 | 1810-224912-11 | TEL | NEW | Ask |
| 9 | COVER UPPER ELECTRODE I | KF82-3782-036A0 | TEL | NEW | Ask |
| 10 | EXHAUST PLATE (LEFT,RIGHT) | 1810-325572-14 1810-325571-14 | TEL | NEW | Ask |
| 11 | EXHAUST PLATE (UP) | 1810-325569-13 | TEL | NEW | Ask |
| 12 | EXHAUST SLIT | 1810-223289-13 | TEL | NEW | Ask |
| 13 | FOCUS RING 8" | 1D10-302209-15 | TEL | NEW | Ask |
| 14 | PLATE EXHAUST SE | 3D10-100845-11 | TEL | NEW | Ask |
| 15 | Q’TZ BASE SUPPORT | 1105-302445-12 | TEL | NEW | Ask |
| 16 | Q’TZ BOAT | 2105-122046-51 | TEL | NEW | Ask |
| 17 | Q’TZ CAP | 2105-220750-51 | TEL | NEW | Ask |
| 18 | Q’TZ FIN | 1105-302530-51 | TEL | NEW | Ask |
| 19 | Q’TZ PEDESTAL BASE | 2105-220860-51 | TEL | NEW | Ask |
| 20 | Q’TZ PROCESS TUBE | 2105-120072-52 | TEL | NEW | Ask |
| 21 | Q’TZ SHUTTER | 1105-302156-61 | TEL | NEW | Ask |
| 22 | RING INSULATOR A7 LA-Q | 1D05-300190-12 | TEL | NEW | Ask |
| 23 | RING INSULATOR A7 LA4-8 | 1D05-300188-12 | TEL | NEW | Ask |
| 24 | RING SHIELD | 1D10-200733-11 | TEL | NEW | Ask |
| 25 | RING,BTM SHIELD SE | 3D10-100844-11 | TEL | NEW | Ask |
| 26 | SHIELD DEPO | 3D10-101194-12 | TEL | NEW | Ask |
| 27 | SHIELD DEPO 85-2 | 1D10-303124-21 | TEL | NEW | Ask |
| 28 | SHIELD DEPO 85-21D10-303124-14 | 1D10-303124-14 | TEL | NEW | Ask |
| 29 | SHIELD DEPO 85-2ID10-303124-21 | ID10-303124-21 | TEL | NEW | Ask |
| 30 | SHIELD PLATE | 3D10-101187-13 | TEL | NEW | Ask |
| 31 | SHUTTER BTM TYPE SE | 3D10-101152-13 | TEL | NEW | Ask |
| 32 | SI FOCUS RING | 1D10-309946-12 | TEL | NEW | Ask |
| 33 | SUPPORT SHILD DEPO CE-Y | 1D10-308540-12 | TEL | NEW | Ask |
| 34 | TAPER BAFFLE PLATE | 1D10-101475-11 | TEL | NEW | Ask |
| 35 | TEL BOTTOM ELECTRODE 6" | 1810-120695-12 | TEL | NEW | Ask |
| 36 | THERMOCOUPLE INNER | 2187-346597-11 | TEL | NEW | Ask |
| 37 | UPPER COOLING PLATE | 1810-221584-12 | TEL | NEW | Ask |
| 38 | UPPER COOLING PLATE 1810-221024-14 | 1810-221024-14 | TEL | NEW | Ask |
| 39 | UPPER ELECTRODE | KF8E-3782-016A0 | TEL | NEW | Ask |
| 40 | UPPER ELECTRODE | 1D10-202177-12 | TEL | NEW | Ask |
| 41 | UPPER ELECTRODE 1A10-203552-11 | 1A10-203552-11 | TEL | NEW | Ask |
| 42 | UPPER ELECTRODE 1D10-201429-15 | 1D10-201429-15 | TEL | NEW | Ask |
| 43 | UPPER ELECTRODE1D10-100670-13 | 1D10-100670-13 | TEL | NEW | Ask |
| 44 | UPPER ELECTRODE1D10-201588-12 | 1D10-201588-12 | TEL | NEW | Ask |
| 45 | UPPER ELECTRODE1D10-202204-12 | 1D10-202204-12 | TEL | NEW | Ask |
| 46 | WINDOW PLATE(DEPO SHILD) | 1D10-309697-11 | TEL | NEW | Ask |
| 47 | WINDOW PLATE(DEPO SHILD)3D10-302734-12 | 3D10-302734-12 | TEL | NEW | Ask |
| 48 | WINDOW PORT | 32005S-42713 | TEL | NEW | Ask |
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